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2.
Fabrication and process development for an integrated optical MEMS microsystem in indium phosphide
by Siwak, Nathan Paul, Ph.D.  University of Maryland, College Park. 2013: 249 pages; 3611384.
3.
Development of thin film encapsulation process for piezoresistive MEMS gyroscope with wide gaps
by Ayanoor-Vitikkate, Vipin, Ph.D.  Stanford University. 2008: 107 pages; 3332985.
4.
Components of an improved design process for micro-electro-mechanical systems
by Lamers, Kristina Lee, Ph.D.  Stanford University. 2009: 278 pages; 3343948.
5.
Large-stroke deformable MEMS mirror for focus control
by Moghimi, Seyyed Mohammad Javad, Ph.D.  Montana State University. 2013: 143 pages; 3608759.
6.
Improvements to a Thermally Actuated MEMS Viscosity Sensor
by Choudhary, Shreyas, M.S.  Rochester Institute of Technology. 2019: 108 pages; 27669852.
7.
Development of Impedance-Based Biomimetic Biochemical Sensors for Detection of Foodborne Pathogens for Food Safety
by Mazrouei, Roya, M.S.  Southern Illinois University at Edwardsville. 2018: 113 pages; 13419759.
8.
Power transformer monitoring using embedded MEMS gas sensor
by Bhat, Krishna Prasad, M.S.  State University of New York at Buffalo. 2011: 68 pages; 1495414.
9.
A MEMS Knudsen pump for high gas flow applications
by Copic, Davor, M.Eng.  University of Louisville. 2008: 79 pages; 1455160.
10.
Functionalizing C-MEMS: From Surface Modification to Structural Modification
by Holmberg, Sunshine, Ph.D.  University of California, Irvine. 2018: 165 pages; 10749596.
11.
The design and implementation of parametrically amplified Lorentz force MEMS magnetometers
by Thompson, Matthew Julian, Ph.D.  University of California, Davis. 2010: 81 pages; 3427430.
12.
SiC Thin-Films on Insulating substrates for Robust MEMS Applications
by Cheng, Lin, Ph.D.  University of Cincinnati. 2003: 168 pages; 10857159.
13.
Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications
by Pecholt, Benjamin Francis, M.S.  Iowa State University. 2009: 175 pages; 1462175.
14.
The Formation of Electrets by Ion Beam Induced Defects for Application in MEMS Devices
by Coutee, Kyle L., M.S.  University of Louisiana at Lafayette. 2018: 88 pages; 10842266.
15.
Processing and characterization of Nickel-base superalloy micro-components and films for MEMS applications
by Burns, Devin E., Ph.D.  The Johns Hopkins University. 2013: 206 pages; 3572711.
16.
Digital feedback control of MEMS devices: Design challenges and power efficient design using multi-timescales
by Kataria, Nitin, Ph.D.  University of California, Santa Barbara. 2009: 189 pages; 3371652.
17.
Modeling, Design, and Prototyping of a MEMS Piezoelectric Permanent Magnet Current Sensor with Vibration-Canceling
by Sherman, Christopher Timothy, Ph.D.  University of California, Berkeley. 2014: 149 pages; 10141292.
19.
Analysis of mathematical models of electrostatically deformed elastic bodies
by Beckham, Jon Regan, Ph.D.  University of Delaware. 2008: 169 pages; 3291768.
20.
Novel Topologies for Highly-Scalable Non-volatile NEMS Relays
by Best, James T., Ph.D.  Carnegie Mellon University. 2019: 142 pages; 27671313.
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Out-of-Plane Thermal Actuators for Sensing and Surface Property Measurements
by Othayq, Mazen M., M.S.  Southern Illinois University at Edwardsville. 2018: 94 pages; 10808565.
24.
Multi-sensor Bayesian estimation interior positioning for stationary and mobile structures
by Tanju, Bereket R., Ph.D.  The George Washington University. 2010: 222 pages; 3433516.
25.
Nanoparticle-Based Surface Modifications for Microtribology Control and Superhydrophobicity
by Hurst, Kendall Matthew, Ph.D.  Auburn University. 2010: 340 pages; 3446237.
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Retro-modulators and fast beam steering for free-space optical communications
by Chan, Trevor Keith, Ph.D.  University of California, San Diego. 2009: 134 pages; 3350309.
29.
Aluminum Nitride Countour Mode Resonators
by Melnick, Joshua Robert, M.S.  Rochester Institute of Technology. 2015: 136 pages; 1591270.
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