With the end of Moore’s Law quickly approaching, there is a drive to find alternative technologies to traditional solid state devices. Static and dynamic power dissipation continues to increase in current CMOS architectures. The electromechanical switch has nearly zero off-state leakage current. Single walled nanotubes have demonstrated exceptional electrical and mechanical properties and are ideal candidates for the actuator in such switches. Presented here for the first time are vertically actuating switches that demonstrate an interesting phenomenon during the initial switching cycles. It was found that a finite length of the nanotube bundle would slip into the trench region. This has not been reported for similar NEMS devices. A horizontally actuating device showed the appearance of similar behavior due to the electrostatic force. Atomic force microscopy was also used to mechanically characterize the suspended bundles. Here, force-distance AFM was used to measure the stiffness of the suspended bundles. Measurements agree well with the theory when using the number of tubes in the bundle as a fitting parameter.
|Advisor:||Adams, George G.|
|Commitee:||Adams, George, Busnaina, Ahmed, McGruer, Nicol, Muftu, Sinan|
|Department:||Mechanical and Industrial Engineering|
|School Location:||United States -- Massachusetts|
|Source:||DAI-B 72/08, Dissertation Abstracts International|
|Subjects:||Electrical engineering, Mechanical engineering, Nanotechnology|
|Keywords:||MEMS, Nanofabrication, Nanotubes, Single-walled carbon nanotubes, Switching|
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