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Dissertation/Thesis Abstract

Light driven microactuators: Design, fabrication, and mathematical modeling
by Han, Li-Hsin, Ph.D., The University of Texas at Austin, 2009, 208; 3409131
Abstract (Summary)

This dissertation is concerned with design, fabrication, and mathematical modeling of three different microactuators driven by light. Compared to electricity, electromagnetic wave is a wireless source of power. A distant light source can be delivered, absorbed, and converted to generate a driving force for a microactuator. The study of light-driven microsystems, still at its early stage, is already expanding the horizon for the research of microsystems.

The microactuators of this dissertation include micro-cantilevers driven by pulsed laser, photo-deformable microshells coated with gold nanospheres, and a nano-particles coated micro-turbine driven by visible light. Experimental investigation and theoretical analysis of these microactuators showed interesting results. These microactuators were functioned based on cross-linked, multiple physics phenomenon, such as photo-heating, thermal expansion, photo-chemistry effect, plasomonics enhancement, and thermal convection in rarefied gas. These multiple physics effects dominate the function of a mechanical system, when the system size becomes small. The modeling results of the microactuators suggest that, to simulate a microscale mechanical system accurately, one has to take account the minimum dimension of the system and to consider the validity of a theoretical model.

Examples of the building of different microstructures were shown to demonstrate the capacity of a digital-micromirror-device (DMD) based apparatus for three-dimensional, heterogeneous fabrication of polymeric microstructures.

Indexing (document details)
Advisor: Chen, Shaochen
Commitee: Frey, Wolfgang, Howell, John R., Milner, Thomas E., Shi, Li, Zhang, Xiaojing
School: The University of Texas at Austin
Department: Mechanical Engineering
School Location: United States -- Texas
Source: DAI-B 71/07, Dissertation Abstracts International
Subjects: Chemical engineering, Mechanical engineering, Optics
Keywords: Actuators, Microfabrication, Microstructure, Nanofabrication, Nanostructure, Nanotechnology
Publication Number: 3409131
ISBN: 978-1-124-06202-0
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