Dissertation/Thesis Abstract

Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications
by Pecholt, Benjamin Francis, M.S., Iowa State University, 2009, 175; 1462175
Abstract (Summary)

Laser microfabrication of silicon carbide for MEMS applications was explored. 3C-SiC and 6H-SiC were laser micromachined using various lasers. 3C-SiC thin films were patterned using an 800 nm 120fs Ti:Sapphire laser. Diaphragm structures 100-130 μm thick with lateral dimensions ranging from 1-2.5 mm were fabricated in bulk 6H-SiC using a 1064 nm, <100 ns, Q-switched Nd:YAG laser. The laser micromachined diaphragms were mechanically characterized by means of nanoindentation and a novel pressure testing apparatus. Mechanical tests indicate that the diaphragms remain sealed under applied gas pressure and that the heat effects and variations in pulse energy from the laser reduce the overall mechanical strength of the diaphragms.

Indexing (document details)
Advisor: Molian, Palaniappa A.
Commitee: Dong, Liang, Wang, Xinwei
School: Iowa State University
Department: Mechanical Engineering
School Location: United States -- Iowa
Source: MAI 47/04M, Masters Abstracts International
Subjects: Electrical engineering, Mechanical engineering
Keywords: 3C-silicon carbide, 6H-slicon carbide, Laser ablation, Laser micromachining, MEMS pressure sensors, Silicon carbide
Publication Number: 1462175
ISBN: 978-1-109-05710-2
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