Dissertation/Thesis Abstract

Localized annealing of polysilicon microstructures by inductively heated ferromagnetic films
by Trombley, Melissa L., Ph.D., Michigan Technological University, 2007, 337; 3258015
Abstract (Summary)

The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration of inductive annealing on polysilicon inertial sensing structures. Though still in its infancy, the results confirm the technology to be a viable option for integrated MEMS as well as any microsystem fabrication process requiring a thermal gradient.

Indexing (document details)
School: Michigan Technological University
School Location: United States -- Michigan
Source: DAI-B 68/03, Dissertation Abstracts International
Subjects: Electrical engineering, Materials science
Keywords: Annealing, Ferromagnetic, Films, Polysilicon
Publication Number: 3258015
ISBN: 978-1-109-95971-0
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