The class of transparent conductive oxides includes the material indium tin oxide (ITO) which has become a widely used material in modern every-day life. It is currently used in touch screens of smartphones and watches, but also used as an optically transparent low electrically resistive contract in the photovoltaics industry. This thesis focused on i) a general overview of ITO characteristics and ii) potential applications of ITO thin films. iii) the main contributions are the development of a comprehensive method and repeatable ellipsometry analysis were reported based on carefully calibrating the sputtering deposition process and rapid thermal annealing process. iv)Future directions are discussed in the last chapter. The thesis is structured in the following way;

An introduction to the topic which provides the context to my research is described in chapter 1. In chapter 2, the preparation and characterization of ITO thin film were shown together with the literature review result. Besides, the useful tool, spectroscopic ellipsometry was introduced in chapter 3. In chapter 4, the theory and idea of the Nano-optics circuit were discussed. Some further applications and ideas were shown in chapter 5. Finally, there comes the conclusion.