This thesis presents the design, analysis and optimization of a MEMS capacitive temperature sensor. The capacitive sensors are utilized in a wide range of applications from industrial and automotive applications to biomedical and food processing. A capacitive sensor has two conductive electrodes and its working principle depends on the change in the position of the electrodes or their effective area, which ultimately results in a change in the capacitance of the device. This thesis describes the modeling and the simulation results of a capacitive temperature sensor with a set of bimorph beams working as thermal actuators. The thermal actuator creates out-of-plane displacements and changes the distance between the electrodes as the ambient temperature changes. The presented bimorph capacitive temperature sensor consists of two bilayer silicon-gold beams and two capacitive electrodes, one of them is fixed to the substrate and the second one is connected to the beams. Different beam sizes and electrode shapes are designed and simulated and the characteristics capacitance-temperature (C-T) response of the sensor is obtained. The goal of this work is to modify and optimize the sensor geometry such that the C-T response is more linear, providing nearly constant sensitivity. ANSYS mechanical APDL is used as the finite element software for simulation and optimization of the sensor design, and coupled-field multiphysics solver is utilized to solve the electrostatic and structural domains. The simulation results show that for a given fabrication process, where the thickness of the structural and sacrificial layers in fabrication process is fixed, it is possible to modify the dimensions and geometry of the sensor such that a C-T response with high linearity is obtained.
|Commitee:||Celik, Serdar, Wang, Fengxia|
|School:||Southern Illinois University at Edwardsville|
|School Location:||United States -- Illinois|
|Source:||MAI 58/04M(E), Masters Abstracts International|
|Subjects:||Engineering, Mechanical engineering|
Copyright in each Dissertation and Thesis is retained by the author. All Rights Reserved
The supplemental file or files you are about to download were provided to ProQuest by the author as part of a
dissertation or thesis. The supplemental files are provided "AS IS" without warranty. ProQuest is not responsible for the
content, format or impact on the supplemental file(s) on our system. in some cases, the file type may be unknown or
may be a .exe file. We recommend caution as you open such files.
Copyright of the original materials contained in the supplemental file is retained by the author and your access to the
supplemental files is subject to the ProQuest Terms and Conditions of use.
Depending on the size of the file(s) you are downloading, the system may take some time to download them. Please be