We studied the temperature transient behavior of an airpit-insulated micro hotplate (µHP) and aerogel-insulated µHP with different airpit heights and aerogel thicknesses. The µHP insulated by 1.3µm-thick aerogel consumes 26.7mW of power at 82°C with a time constant of 114.5 µsec, while the µHP insulated by 4?µm-thick aerogel consumes 35.6mW of power to provide 220°C with a time constant of 211.6 µsec. At the same time, a 100 µm-deep airpit-insulated ?HP consumes 18mW of power to reach approximately 400°C. The time constant of aerogel does not depend just on material properties but also on the structural design of the micro-heater. The temperature transient response time of µHPs is continued to improve from using air-pited, recessed silica aerogel, to thick-film silica aerogel.
|Advisor:||Madani, Mohammad R.|
|Commitee:||Fekih, Afef, Pratt, Michael A.|
|School:||University of Louisiana at Lafayette|
|School Location:||United States -- Louisiana|
|Source:||MAI 55/03M(E), Masters Abstracts International|
|Keywords:||Aerogel, Micro-hotplate, Thermal capacitance, Thermal insulation, Thermal resistance, Thermal transient|
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